產(chǎn)品分類
石墨烯卷對(duì)卷
所屬分類：
石墨烯設(shè)備
概要：
? 石墨烯薄膜產(chǎn)業(yè)化設(shè)備 ? 寬幅卷對(duì)卷連續(xù)生長(zhǎng) ? APC系統(tǒng):真空蝶閥自動(dòng)控制 ? 碳源等工藝氣體MFC控制 ? 薄膜制備過程全自動(dòng)控制 ? 三腔室結(jié)構(gòu)
關(guān)鍵詞：
石墨烯卷對(duì)卷
石墨烯卷對(duì)卷
產(chǎn)品特點(diǎn)/Product Characteristics：
♦ 石墨烯薄膜產(chǎn)業(yè)化設(shè)備
Graphene film industrialization equipment
♦ 寬幅卷對(duì)卷連續(xù)生長(zhǎng)
Wide roll-to-roll continuous growth
♦ APC系統(tǒng):真空蝶閥自動(dòng)控制
APC System: Automatic Control of Vacuum Butterfly Valve
♦ 碳源等工藝氣體MFC控制
MFC control of process gas such as carbon source
♦ 薄膜制備過程全自動(dòng)控制
Automatic control of film preparation process
♦ 三腔室結(jié)構(gòu)
Three-chamber structure
技術(shù)指標(biāo)/Technical Indicators：
♦ 工作溫度:800-1050°C
Operating temperature: 800-1050°c
♦ 工藝管材質(zhì):石英管
Material of process tube: quartz tube
♦ 銅箔寬度:500mm
lnner diameter of process pipe: medium 550mm
♦ 極限真空度:小于3Pa，可恒壓控制
Limit vacuum degree: less than 3Pa, which can be controlled by constant pressure
♦ 恒溫區(qū):1000mm、五段控溫
Constant temperature zone: 1000mm, five-stage temperature control
♦ 工藝管內(nèi)徑:550mm
lnner diameter of process pipe: medium 550mm
♦ 銅箔運(yùn)行速度約:100-400mm/min，可調(diào)
The running speed of copper foil is about 100-400mm/min, which can be adjusted
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